ID 3170
File
Title Transcription
チョウ セイミツ コウサク キカイ ノ タメノ イチギメ ギジュツ テンボウ
Title Alternative
Research Outlook of Positioning Technology for Ultraprecision Machine Tools
Authors
Keywords
Active control
Hydrostatic lubrication
Machine tool
Positioning
Tribology
Abstract
Positioning technology supporting the development of the ultraprecision machine tool is summarized. For the basic understanding of positioning technology, dynamics of the positioning mechanism and tribology of the guideway are explained. Then, positioning system using hydrostatic lubrication widely used in the ultraprecision machine tools is described, where the positioning resolution of the system is 1nm (10⁻⁹m). Finally, it is shown that the positioning with 10pm (10⁻¹¹m) resolution is realized by using the active control of the aerostatic guigeway.
Publisher
鳥取大学大学院工学研究科
Content Type
Departmental Bulletin Paper
ISSN
0385-8596
Journal Title
鳥取大学大学院工学研究科/工学部研究報告
Current Journal Title
Reports of the Faculty of Engineering, Tottori University
Volume
42
Start Page
17
End Page
24
Published Date
2012-01-10
Text Version
Publisher
Citation
鳥取大学大学院工学研究科/工学部研究報告. 2012, 42, 17-24
Department
Faculty of Engineering/Graduate School of Engineering
Language
Japanese