| File | |
| Title Transcription | チョウ セイミツ コウサク キカイ ノ タメノ イチギメ ギジュツ テンボウ
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| Title Alternative | Research Outlook of Positioning Technology for Ultraprecision Machine Tools
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| Authors | |
| Keywords | Active control
Hydrostatic lubrication
Machine tool
Positioning
Tribology
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| Abstract | Positioning technology supporting the development of the ultraprecision machine tool is summarized. For the basic understanding of positioning technology, dynamics of the positioning mechanism and tribology of the guideway are explained. Then, positioning system using hydrostatic lubrication widely used in the ultraprecision machine tools is described, where the positioning resolution of the system is 1nm (10⁻⁹m). Finally, it is shown that the positioning with 10pm (10⁻¹¹m) resolution is realized by using the active control of the aerostatic guigeway.
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| Publisher | 鳥取大学大学院工学研究科
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| Content Type |
Departmental Bulletin Paper
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| ISSN | 0385-8596
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| Journal Title | 鳥取大学大学院工学研究科／工学部研究報告
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| Current Journal Title |
Reports of the Faculty of Engineering, Tottori University
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| Volume | 42
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| Start Page | 17
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| End Page | 24
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| Published Date | 2012-01-10
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| Text Version |
Publisher
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| Citation | 鳥取大学大学院工学研究科／工学部研究報告. 2012, 42, 17-24
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| Department |
Faculty of Engineering/Graduate School of Engineering
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| Language |
Japanese
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