| File | |
| Title Transcription | チョウ コウシンクウ ジッケン ヨウ スパッタ ジョウチャク ゲン ノ カイハツ
|
| Title Alternative | Sputtering Deposition Source for an Ultra High Vacuum (UHV) Experiment.
|
| Authors | |
| Publisher | 鳥取大学工学部
|
| Content Type |
Departmental Bulletin Paper
|
| ISSN | 0385-8596
|
| NCID | AN00174610
|
| Journal Title | 鳥取大学工学部研究報告
|
| Current Journal Title |
Reports of the Faculty of Engineering, Tottori University
|
| Volume | 12
|
| Issue | 1
|
| Start Page | 140
|
| End Page | 153
|
| Published Date | 1981-10
|
| Text Version |
Publisher
|
| Citation | 鳥取大学工学部研究報告. 1981, 12(1), 140-153
|
| Department |
Faculty of Engineering/Graduate School of Engineering
|
| Language |
Japanese
|
