File
Title Transcription
チョウ コウシンクウ ジッケン ヨウ スパッタ ジョウチャク ゲン ノ カイハツ
Title Alternative
Sputtering Deposition Source for an Ultra High Vacuum (UHV) Experiment.
Authors
Publisher
鳥取大学工学部
Content Type
Departmental Bulletin Paper
ISSN
0385-8596
NCID
AN00174610
Journal Title
鳥取大学工学部研究報告
Current Journal Title
Reports of the Faculty of Engineering, Tottori University
Volume
12
Issue
1
Start Page
140
End Page
153
Published Date
1981-10
Text Version
Publisher
Citation
鳥取大学工学部研究報告. 1981, 12(1), 140-153
Department
Faculty of Engineering/Graduate School of Engineering
Language
Japanese