@article{oai:repository.lib.tottori-u.ac.jp:00003152, author = {水本, 洋 and Mizumoto, Hiroshi}, journal = {鳥取大学大学院工学研究科/工学部研究報告, Reports of the Graduate School/Faculty of Engineering, Tottori University}, month = {Jan}, note = {Positioning technology supporting the development of the ultraprecision machine tool is summarized. For the basic understanding of positioning technology, dynamics of the positioning mechanism and tribology of the guideway are explained. Then, positioning system using hydrostatic lubrication widely used in the ultraprecision machine tools is described, where the positioning resolution of the system is 1nm (10⁻⁹m). Finally, it is shown that the positioning with 10pm (10⁻¹¹m) resolution is realized by using the active control of the aerostatic guigeway.}, pages = {17--24}, title = {超精密工作機械のための位置決め技術展望}, volume = {42}, year = {2012}, yomi = {ミズモト, ヒロシ} }