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The Surface Structure Analysis of a Heat-treated Metal/Si System by a Quantitative Auger Electron Spectroscopy Method
https://repository.lib.tottori-u.ac.jp/records/3328
https://repository.lib.tottori-u.ac.jp/records/332877a6f5d3-01f1-4b00-9469-5a40eb1fa9eb
名前 / ファイル | ライセンス | アクション |
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2018-06-22 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | The Surface Structure Analysis of a Heat-treated Metal/Si System by a Quantitative Auger Electron Spectroscopy Method | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題 | Auger electron spectroscopy | |||||
キーワード | ||||||
主題 | Quantitative analysis | |||||
キーワード | ||||||
主題 | Surface structure | |||||
キーワード | ||||||
主題 | Surface composition | |||||
キーワード | ||||||
主題 | Au/Si, Cu/Si, Pd/Si, Metal silicide | |||||
キーワード | ||||||
主題 | Data processing with micro-computer | |||||
キーワード | ||||||
言語 | en | |||||
主題 | Auger electron spectroscopy | |||||
キーワード | ||||||
言語 | en | |||||
主題 | Quantitative analysis | |||||
キーワード | ||||||
言語 | en | |||||
主題 | Surface structure | |||||
キーワード | ||||||
言語 | en | |||||
主題 | Surface composition | |||||
キーワード | ||||||
言語 | en | |||||
主題 | Au/Si, Cu/Si, Pd/Si, Metal silicide | |||||
キーワード | ||||||
言語 | en | |||||
主題 | Data processing with micro-computer | |||||
資源タイプ | ||||||
資源タイプ | departmental bulletin paper | |||||
著者 |
Nishimori, Katsumi
× Nishimori, Katsumi× Tokutaka, Heizo× Masuda, Masashi× Ishihara, Naganori× Nishimori, Katsumi× Masuda, Masashi× Ishihara, Naganori |
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著者所属 | ||||||
Department of Electronics | ||||||
著者所属 | ||||||
Department of Electronics | ||||||
著者所属 | ||||||
Department of Electronics | ||||||
著者所属 | ||||||
Department of Electronics | ||||||
書誌情報 |
ja : 鳥取大学工学部研究報告 en : Reports of the Faculty of Engineering, Tottori University 巻 19, 号 1, p. 41-58, 発行日 1988-11 |
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出版者 | ||||||
出版者 | 鳥取大学工学部 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 03858596 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00174610 | |||||
権利 | ||||||
権利情報 | 注があるものを除き、この著作物は日本国著作権法により保護されています。 / This work is protected under Japanese Copyright Law unless otherwise noted. | |||||
情報源 | ||||||
関連名称 | 鳥取大学工学部研究報告. 1988, 19(1), 41-58 | |||||
著者版フラグ | ||||||
出版タイプ | VoR |